碳化硅晶体的可见近红外透射光谱分析

山东大学学报(工学版) ›› 2011, Vol. 41 ›› Issue (2): 126-129.

碳化硅晶体的可见近红外透射光谱分析

于元勋1,连洁2*,官文栎1,王公堂3,李娟4,徐现刚4

1. 齐鲁师范学院物理系, 山东济南 250013; 2. 山东大学信息科学与工程学院, 山东济南 250100;
3. 山东师范大学物理与电子科学学院, 山东济南 250014; 4. 山东大学晶体材料国家重点实验室, 山东济南 250100

收稿日期:2010-06-30 出版日期:2011-04-16 发布日期:2010-06-30
通讯作者: 连洁(1964- ),女,安徽阜阳人,教授,博士,主要研究方向为光电材料与器件. Email:lianjie@sdu.edu.cn E-mail:lianjie@sdu.edu.cn
作者简介:于元勋(1964- ),男,山东莱州人,副教授,硕士,主要研究方向为光电材料. E-mail:yuyuanxun@163.com
基金资助:
山东大学晶体材料国家重点实验室开放课题资助项目(KF0703)；山东省高等学校科技计划资助项目(J10LA52)

Analysis of transmission spectra of 6H—SiC crystal in the visible
and near infrared range

YU Yuanxun1, LIAN Jie2*, GUAN Wenli1, WANG Gongtang3, LI Juan4, XU Xiangang4

1. Department of Physics, Qilu Normal University, Jinan 250013, China;
2. School of Information Science and Engineering, Shandong University, Jinan 250100, China;
3. College of Physics and Electronics, Shandong Normal University, Jinan 250014, China；
4. State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China

Received:2010-06-30 Online:2011-04-16 Published:2010-06-30

摘要/Abstract

摘要：

利用紫外可见分光光度计和红外光谱测量系统,在室温下分别测量了本征和掺氮6H—SiC单晶的可见和近红外透射光谱。由光谱分析可知,6H—SiC单晶在可见及近红外区是透明的,而掺氮导致SiC单晶在可见和近红外区都有吸收,掺杂还使得带隙变窄。利用透射光谱,得到6H—SiC单晶在可见和近红外区的色散关系曲线和色散方程。此外,对掺氮SiC晶体透射光谱的分析表明,在625nm处的吸收对应自由电子从氮原子引入的导带尾的低能级到更高能级的跃迁,在2500nm附近的透射率下降是由自由载流子吸收引起的。

关键词: 6H&mdash, SiC晶体, 透射光谱, 光学性质

Abstract:

Transmission spectra of instinct and N doped 6H—SiC crystals in the visible and near infrared range were measured by using the UVVis spectrophotometer and infrared spectrum measurement system. Optical transmission spectra demonstrated that the 6H—SiC single crystal was transparent for visible and near infrared radiation. Compared with the 6H—SiC single crystal, it was also observed that nitrogen doping could make the bandgap narrower, and the optical absorption of N doped SiC appeared in the visible and near infrared range. Also, dispersion curves were obtained by the transmission spectra, and the refractive indices were analyzed using the dispersion equation in the transparent region. In addition, spectra analysis showed that the absorption at 625nm corresponded to the free electron transition from the low energy level of band tailing induced by N doping to the high energy level in the conduction band, and the absorption of free carrier resulted in low transmission around 2500nm for nitrogen doped crystal.

Key words: 6H—SiC, transmission spectra, optical property

于元勋1,连洁2*,官文栎1,王公堂3,李娟4,徐现刚4. 碳化硅晶体的可见近红外透射光谱分析[J]. 山东大学学报(工学版), 2011, 41(2): 126-129.

YU Yuanxun1, LIAN Jie2*, GUAN Wenli1, WANG Gongtang3, LI Juan4, XU Xiangang4. Analysis of transmission spectra of 6H—SiC crystal in the visible
and near infrared range[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2011, 41(2): 126-129.

参考文献

多维度评价

Viewed

Full text

Abstract

Cited

Shared

Discussed