基于衍射和透射光学模型的边沿定位法

山东大学学报(工学版) ›› 2012, Vol. 42 ›› Issue (4): 54-59.

基于衍射和透射光学模型的边沿定位法

陶亮^1,2,孙同景²,李振华²,段彬²,孙兴³

1.山东建筑大学信息与电气工程学院山东省智能建筑技术重点技术实验室, 山东济南 250101;
2.山东大学控制科学与工程学院, 山东济南 250061; 3.山东青年政治学院, 山东济南 250103

收稿日期:2012-03-15 出版日期:2012-08-20 发布日期:2012-03-15
作者简介:陶亮(1981- ),男,山东济南人,博士研究生,主要研究方向为计算机先进控制与系统. E-mail: taoliang@mail.sdu.edu.cn
基金资助:
国防基础科研计划资助项目(B142008020908); 国家自然科学基金资助项目(60904097); 山东大学自主创新基金资助项目(2010GN067); 济南市青年科技明星计划资助项目(20110304)

Diffraction and transmission optical model based edge location algorithm

TAO Liang^1,2, SUN Tong-jing², LI Zhen-hua², DUAN Bin², SUN Xing³

1. Shandong Provincial Key Laboratory of Intelligent Buildings Technology, School of Information ＆
Electric Engineering, Shandong Jianzhu University, Jinan 250101, China;
2. School of Control Science and Engineering, Shandong University, Jinan 250061, China;
3. Shandong Youth University of Political Science, Jinan 250103, China

Received:2012-03-15 Online:2012-08-20 Published:2012-03-15

摘要/Abstract

摘要：

给出了一种适用于光的衍射和透射双重作用下的边沿定位算法,能够准确定位曝光对象投影图像的边沿。分析了普通单色可见光的衍射模型在透射环境下的局限性,然后根据菲涅尔衍射模型和透射性光线的衰减定律,提出了衍射和透射双重作用下的光强模型,基于该模型推导了边沿定位算法。所提出的新光学模型,是单色光的菲涅尔衍射模型在透射情形下的推广,边沿定位是该模型的一个重要应用。经过使用待定系数法计算曝光对象材料的衰减系数集,使该算法独立于曝光对象的具体材质。实验结果验证了该算法的定位精度和效率均优于算子法。

关键词: 边沿定位, 衍射, 透射衰减, 光强分布, 光学模型

Abstract:

An edge location algorithm based on optical mechanism was proposed. By the combination of fresnel diffraction theory and transmission attenuation law, the edge of the projection image was precisely located. First, the monochromatic light diffraction model and its limitations in transmission environment were presented. After analyzing the attenuation characteristic of the transmitted light, an intensity distributing optical model dually affected by transmission and diffraction was proposed. Finally, the edge location algorithm was derived. The optical model extended the fresnel diffraction theory to the transmission condition. The edge location was an important one of its applications. For engineering application, the calculation of the attenuation coefficients was given. Therefore, the algorithm was independent on the material of the exposure object. The experimental results proved that the accuracy and the efficiency were superior to operator method.

Key words: edge location, diffraction, transmission attenuation, intensity distributing, optical model

陶亮1,2,孙同景2,李振华2,段彬2,孙兴3. 基于衍射和透射光学模型的边沿定位法[J]. 山东大学学报(工学版), 2012, 42(4): 54-59.

TAO Liang1,2, SUN Tong-jing2, LI Zhen-hua2, DUAN Bin2, SUN Xing3. Diffraction and transmission optical model based edge location algorithm[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2012, 42(4): 54-59.

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