• 控制科学与工程 •

### 基于衍射和透射光学模型的边沿定位法

1. 1.山东建筑大学信息与电气工程学院山东省智能建筑技术重点技术实验室, 山东 济南 250101;
2.山东大学控制科学与工程学院, 山东 济南 250061; 3.山东青年政治学院, 山东 济南 250103
• 收稿日期:2012-03-15 出版日期:2012-08-20 发布日期:2012-03-15
• 作者简介:陶亮(1981- ),男,山东济南人,博士研究生,主要研究方向为计算机先进控制与系统. E-mail: taoliang@mail.sdu.edu.cn
• 基金资助:

国防基础科研计划资助项目(B142008020908); 国家自然科学基金资助项目(60904097); 山东大学自主创新基金资助项目(2010GN067); 济南市青年科技明星计划资助项目(20110304)

### Diffraction and transmission optical model based edge location algorithm

TAO Liang1,2, SUN Tong-jing2, LI Zhen-hua2, DUAN Bin2, SUN Xing3

1. 1. Shandong Provincial Key Laboratory of Intelligent Buildings Technology, School of Information ＆
Electric Engineering, Shandong Jianzhu University, Jinan 250101, China;
2. School of Control Science and Engineering, Shandong University, Jinan 250061, China;
3. Shandong Youth University of Political Science, Jinan 250103, China
• Received:2012-03-15 Online:2012-08-20 Published:2012-03-15

Abstract:

An edge location algorithm based on optical mechanism was proposed. By the combination of fresnel diffraction theory and transmission attenuation law, the edge of the projection image was precisely located. First, the monochromatic light diffraction model and its limitations in transmission environment were presented. After analyzing the attenuation characteristic of the transmitted light, an intensity distributing optical model dually affected by transmission and diffraction was proposed. Finally, the edge location algorithm was derived. The optical model extended the fresnel diffraction theory to the transmission condition. The edge location was an important one of its applications. For engineering application, the calculation of the attenuation coefficients was given. Therefore, the algorithm was independent on the material of the exposure object. The experimental results proved that the accuracy and the efficiency were superior to operator method.

 [1] 姜国新 . 关于衍射原理应用的设计性实验[J]. 山东大学学报(工学版), 2008, 38(1): 105-108 . [2] 牛新生,叶华,王亮 . 多层包扎尿素合成塔无损评价方法研究[J]. 山东大学学报(工学版), 2007, 37(4): 0-0 .
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