Abstract: For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thinfilm gas sensing basic material was developed. The ZnO/1%CeO2 thinfilm was prepared by adopting the powder sputtering method. Based on the characteristic of the hexahedron crystal of substrate Al2O3 and ZnO, a thinfilm gas sensor was developed by selecting proper sputtered parameters. A micro miniature pensile gas sensor was acquired by double point welding of the chip and wiring pole techniques. Longterm experiment results show that the favorable gas sensing character and stability of the element is suitable for further application.

Key words: thinfilm, double point weld , powder sputter