相变对ZrO2／SiO2多层膜激光损伤阈值的影响

山东大学学报(工学版) ›› 2009, Vol. 39 ›› Issue (1): 114-117.doi:

相变对ZrO₂／SiO₂多层膜激光损伤阈值的影响

吴师岗

山东理工大学材料科学与工程学院, 山东淄博 255049

收稿日期:2008-03-17 修回日期:1900-01-01 出版日期:2009-02-16 发布日期:2009-02-16
通讯作者: 吴师岗

The effect of phase transformation on laser induced damage threshold of ZrO₂／SiO₂optical coatings

WU Shigang

School of Materials Science and Engineering, Shandong University of Technology, Zibo 255049, China

Received:2008-03-17 Revised:1900-01-01 Online:2009-02-16 Published:2009-02-16
Contact: WU Shigang

摘要/Abstract

摘要：

摘要：用电子束蒸发法制备出ZrO2／SiO2和YSZ／SiO2多层膜,分别测定了薄膜结构特性和激光损伤阈值. 实验结果表明：Y2O3稳定的ZrO2镀膜材料在电子束蒸发过程中不会发生相变,而未稳定的ZrO2则必然发生相变产生喷溅,使缺陷增加,从而使损伤阈值降低. 通过分析认为相变引起的缺陷是YSZ／SiO2和ZrO2／SiO2高反膜损伤阈值差别的主要原因.

关键词: 关键词:相变；稳定；缺陷；激光损伤阈值

Abstract:

ZrO2／SiO2and YSZ／SiO2 optical coatings were prepared by the electronbeam evaporation method, and structural properties and

laser induced damage threshold(LIDT) were measured. These results indicate that during the course of electron beam thermal

evaporation, the Y2O3 stabilized ZrO2 material did not have a phase transformation, while the unstabilized ZrO2 material did,

which can result in defect increase and LIDT decrease. It was found that defects by phase transformation is the main reason for

the difference of damage threshold between high reflect thin film YSZ／SiO2and ZrO2／SiO2.

Key words: Key words: phase transformation; stability; defects; LIDT

中图分类号:

O484

吴师岗. 相变对ZrO₂／SiO₂多层膜激光损伤阈值的影响[J]. 山东大学学报(工学版), 2009, 39(1): 114-117.

WU Shigang. The effect of phase transformation on laser induced damage threshold of ZrO₂／SiO₂optical coatings[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2009, 39(1): 114-117.

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相变对ZrO₂／SiO₂多层膜激光损伤阈值的影响

The effect of phase transformation on laser induced damage threshold of ZrO₂／SiO₂optical coatings

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