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山东大学学报(工学版)

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气敏元件闭室测试中气体浓度的变化

袁庆华1, 高红2, 裘南畹1   

  1. 1. 山东大学物理和微电子学院,山东济南250061;2. 山东冶金技术学院电气与自动化工程系,山东济南250000
  • 收稿日期:2004-10-15 修回日期:1900-01-01 出版日期:2006-08-24 发布日期:2006-08-24
  • 通讯作者: 袁庆华

The varation of gas concentration in the closed testing of the air sensors

YUAN Qinghua1,GAO Hong2,QIU Nanwan1   

  1. 1. School of Physics and Microelectronics,Shandong University,Jinan 250061,China;2. Department of Electrical and Autometical Engineering,Shandong Metallurgy Technology Institute,Jinan 250000,China
  • Received:2004-10-15 Revised:1900-01-01 Online:2006-08-24 Published:2006-08-24
  • Contact: YUAN Qinghua<

摘要: 给出气敏元件反应放热率Prea的公式,并由此给出在闭室测试中气体浓度C随时间变化的微分方程.通过求解微分方程给出的浓度C随时间变化曲线,表明了气体的浓度衰减很慢,而由此带来的误差一般可以忽略.

关键词: 气敏元件, 闭室测试, 反应放热率

Abstract: The formula of reaction exothermic rate Prea of sensors and the differential equation of closed test chamber gas concentration C varies with t is given. From the solution of differential equation Ct curve, it is proved that the relaxation of gas concentration is rather slow and the errors of clssed chember test can be neglected.

Key words: closed chamber test, reaction exothermic rate , gas sensors

[1] 田芳1,张颖欣2,张礼3,侯秀萍3,裘南畹3. 新型金属氧化物薄膜气敏元件基材料的开发[J]. 山东大学学报(工学版), 2009, 39(2): 104-107.
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