激活能测试装置设计及微晶硅薄膜激活能测试

山东大学学报(工学版) ›› 2010, Vol. 40 ›› Issue (4): 149-152.

激活能测试装置设计及微晶硅薄膜激活能测试

陈庆东1,王俊平1,张宇翔2,卢景霄2

1. 滨州学院物理与电子科学系, 山东滨州 256603;
2. 郑州大学材料物理教育部重点实验室, 河南郑州 450052

收稿日期:2009-11-25 出版日期:2010-08-16 发布日期:2009-11-25
作者简介:陈庆东(1981-),男,山东临沂人,助教,硕士，主要研究方向为太阳能电池及相关薄膜材料的制备.E-mail:chenqingdong-88@163.com
基金资助:
滨州学院青年人才创新工程科研基金资助项目(BZXYQNLG200821)

The design of activation energy measurement equipment and measurement of activation energy of microcrystalline silicon thin films

CHEN Qing-dong1, WANG Jun-ping1, ZHANG Yu-xiang2, LU Jing-xiao2

1.Department of Physics and Electronics Science, Binzhou College, Binzhou 256603, China;
2. Ministry of Education Key Laboratory of Material Physics, Zhengzhou University, Zhengzhou 450052, China

Received:2009-11-25 Online:2010-08-16 Published:2009-11-25

摘要/Abstract

摘要：

为了分析微晶硅薄膜的本征特性,设计了激活能测试装置。测试装置包括测试平台、真空系统和加热控制系统。同时给出激活能计算方法,并对不同电压、不同取点个数对激活能测试的影响进行分析。分析结果表明,不同测试电压对激活能测试结果影响很小,不同取点个数计算的激活能差别也很小。

关键词: 微晶硅, 激活能, 测试装置

Abstract:

Activation energy measurement equipment were designed to analysis the intrinsic property of microcrystalline silicon film. The equipment included the measurement platform, the vacuum system and heating control system of equipment. The computation method of activation energy was also put forward. The effect of different voltages and different dot numbers on the activation energy measuring were analyzed. The result showed that both different voltage and different dot numbers have little effect on the activation energy result.

Key words: microcrystalline silicon, activation energy, measurement equipment

陈庆东1,王俊平1,张宇翔2,卢景霄2. 激活能测试装置设计及微晶硅薄膜激活能测试[J]. 山东大学学报(工学版), 2010, 40(4): 149-152.

CHEN Qing-dong1, WANG Jun-ping1, ZHANG Yu-xiang2, LU Jing-xiao2. The design of activation energy measurement equipment and measurement of activation energy of microcrystalline silicon thin films[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2010, 40(4): 149-152.

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