金属氧化物;薄膜气敏元件;基材料," /> 金属氧化物;薄膜气敏元件;基材料,"/> metal oxide; thin film gas sensor; basic material,"/>

JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE) ›› 2009, Vol. 39 ›› Issue (2): 104-107.doi:

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  1. 1. School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100, China;
    2. Jinan Semiconduction Institution, Jinan 250100, China;
    3. School of Physics, Shandong University, Jinan 250100, China
  • Received:2009-01-09 Revised:1900-01-01 Online:2009-04-16 Published:2009-04-16

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Key words: metal oxide; thin film gas sensor; basic material')">metal oxide; thin film gas sensor; basic material

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