粉末溅射ZnO薄膜酒敏元件

山东大学学报(工学版)

粉末溅射ZnO薄膜酒敏元件

周　磊¹，邢建平¹，周　晨¹，洪德斌¹，裘南畹²

1. 山东大学信息科学与工程学院，山东济南 250100；2. 山东大学物理与微电子学院，山东济南 250100

收稿日期:2006-03-08 修回日期:1900-01-01 出版日期:2007-02-24 发布日期:2007-02-24
通讯作者: 周　磊

Powder sputtered ZnO thin-film alcohol sensor

ZHOU Lei¹, XING Jian-ping¹, ZHOU Chen¹, HONG De-bin¹, QIU Nan-yuan²

1. School of Information Science and Engineering, Shandong University, Jinan 250100, China；2. School of Physics and Microelectronics, Shandong University, Jinan 250100, China

Received:2006-03-08 Revised:1900-01-01 Online:2007-02-24 Published:2007-02-24
Contact: ZHOU Lei

摘要/Abstract

摘要： 针对金属氧化物薄膜气敏元件传统制造工艺中存在的掺杂不稳问题，开发了一种实用化的ZnO薄膜气敏基材料.采用粉末溅射法研制ZnO:1%CeO2薄膜，利用衬底Al2O3与ZnO晶体均为六方结构的特点，选择适当溅射参数研制出薄膜气敏元件，同时通过悬挂芯片双点焊工艺，使元件更加小型化.长期检测结果表明，此类元件气敏特性和稳定性良好，适合进一步推广应用.

关键词: 粉末溅射, 薄膜, 双点焊

Abstract: For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thinfilm gas sensing basic material was developed. The ZnO/1%CeO2 thinfilm was prepared by adopting the powder sputtering method. Based on the characteristic of the hexahedron crystal of substrate Al2O3 and ZnO, a thinfilm gas sensor was developed by selecting proper sputtered parameters. A micro miniature pensile gas sensor was acquired by double point welding of the chip and wiring pole techniques. Longterm experiment results show that the favorable gas sensing character and stability of the element is suitable for further application.

Key words: thinfilm, double point weld , powder sputter

中图分类号:

TN305.94

周　磊,邢建平,周　晨,洪德斌,裘南畹 . 粉末溅射ZnO薄膜酒敏元件[J]. 山东大学学报(工学版), 2007, 37(1): 111-114 .

ZHOU Lei,XING Jian-ping,ZHOU Chen,HONG De-bin,QIU Nan-yuan . Powder sputtered ZnO thin-film alcohol sensor[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2007, 37(1): 111-114 .

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[2]	田芳,郭晓丽,张颖欣,王倩,裘南畹 . 粉末溅射金属氧化物气敏薄膜和元件Ⅰ. 粉末溅射金属氧化物气敏薄膜[J]. 山东大学学报(工学版), 2008, 38(5): 99-101 .