JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE) ›› 2010, Vol. 40 ›› Issue (4): 149-152.

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The design of activation energy measurement equipment and measurement  of activation energy of  microcrystalline silicon thin films

CHEN Qing-dong1, WANG Jun-ping1, ZHANG Yu-xiang2, LU Jing-xiao2   

  1. 1.Department of Physics and Electronics Science, Binzhou College, Binzhou 256603, China;
    2. Ministry of Education Key Laboratory of Material Physics, Zhengzhou University, Zhengzhou 450052, China
  • Received:2009-11-25 Online:2010-08-16 Published:2009-11-25

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Abstract:

Activation energy measurement equipment were designed to analysis the intrinsic property of microcrystalline silicon film. The equipment included the measurement platform, the vacuum system and heating control system of equipment. The computation method of activation energy was also put forward. The effect of different voltages and different dot numbers on the activation energy measuring were analyzed. The result showed that both different voltage and different dot numbers have little effect on the activation energy result.

Key words: microcrystalline silicon, activation energy, measurement equipment

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