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Powder sputtered ZnO thin-film alcohol sensor

ZHOU Lei1, XING Jian-ping1, ZHOU Chen1, HONG De-bin1, QIU Nan-yuan2   

  1. 1. School of Information Science and Engineering, Shandong University, Jinan 250100, China；2. School of Physics and Microelectronics, Shandong University, Jinan 250100, China
  • Received:2006-03-08 Revised:1900-01-01 Online:2007-02-24 Published:2007-02-24
  • Contact: ZHOU Lei

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Abstract: For the instability of metal oxide thin film gas sensor in doping process, a practical ZnO thinfilm gas sensing basic material was developed. The ZnO/1%CeO2 thinfilm was prepared by adopting the powder sputtering method. Based on the characteristic of the hexahedron crystal of substrate Al2O3 and ZnO, a thinfilm gas sensor was developed by selecting proper sputtered parameters. A micro miniature pensile gas sensor was acquired by double point welding of the chip and wiring pole techniques. Longterm experiment results show that the favorable gas sensing character and stability of the element is suitable for further application.

Key words: thinfilm, double point weld , powder sputter

CLC Number: 

  • TN305.94
[1] TIAN Fang,GUO Xiao-li,ZHANG Ying-xin,WANG Qian,QIU Nan-wan . Powder sputter metal oxide gas thin film and sensorsⅠ. Powder sputter metal oxide gas thin film
[J]. JOURNAL OF SHANDONG UNIVERSITY (ENGINEERING SCIENCE), 2008, 38(5): 99-101 .
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